ACAE Seminar

Title: MEMS Technology and Devices
Speaker: Prof. Liu Ai Qun
School of Electrical & Electronic Engineering
Nanyang Technological University, Singapore
Date: Dec 03, 2004 Friday
Time: 11:00 a.m. - 12:00 p.m.
Venue: Room 215, William M. W. Mong Egineering Building, CUHK

Abstract
Microelectromechanical Systems (MEMS) is to introduce critical thinking in the context of micro scale devices by applying practical design examples in various microfabrication processes, which fabrications include bulk-micromachining, surface micromachining. This presentation will highlight photonic MEMS, biomedical MEMS and its applications and devices innovative and bottlenecks for commercialization such as the packaging, reliability and stability.

Biography
Dr. Liu Ai Qun joined Nanyang Technological University as an Associate Professor at the Microelectronics Division, School of Electrical & Electronic Engineering since 2000 and began a photonics MEMS programme in fibre optics communication applications. His research includes optical switches, optical variable attenuator (VOA), tunable laser, reconfigurable OADM and optical filters etc. He is also working on large research grant invested by the military on the RF MEMS project, which include RF switch, tunable capacitor, filter and true-time delay (TTD) phase shift antenna which are being integrated onto a single-silicon chip. Currently, his major research is to focus. He is also appointed as an Associate Editor and member of the Editorial Board of the IEEE Sensor Journal.

***** ALL ARE WELCOME *****

Enquiries : Ms. Winnie Wong or Prof. J. Wang, Department of Automation and Computer-Aided Engineering, CUHK at 2609 8337. *ACAE Series (2004-05) is contained in the World-Wide Web home page at http://www.acae.cuhk.edu.hk/en/seminars/seminars.html

Title:	MEMS Technology and Devices
Speaker:	Prof. Liu Ai Qun School of Electrical & Electronic Engineering Nanyang Technological University, Singapore
Date:	Dec 03, 2004 Friday
Time:	11:00 a.m. - 12:00 p.m.
Venue:	Room 215, William M. W. Mong Egineering Building, CUHK
Abstract Microelectromechanical Systems (MEMS) is to introduce critical thinking in the context of micro scale devices by applying practical design examples in various microfabrication processes, which fabrications include bulk-micromachining, surface micromachining. This presentation will highlight photonic MEMS, biomedical MEMS and its applications and devices innovative and bottlenecks for commercialization such as the packaging, reliability and stability.
Biography Dr. Liu Ai Qun joined Nanyang Technological University as an Associate Professor at the Microelectronics Division, School of Electrical & Electronic Engineering since 2000 and began a photonics MEMS programme in fibre optics communication applications. His research includes optical switches, optical variable attenuator (VOA), tunable laser, reconfigurable OADM and optical filters etc. He is also working on large research grant invested by the military on the RF MEMS project, which include RF switch, tunable capacitor, filter and true-time delay (TTD) phase shift antenna which are being integrated onto a single-silicon chip. Currently, his major research is to focus. He is also appointed as an Associate Editor and member of the Editorial Board of the IEEE Sensor Journal.
*** ALL ARE WELCOME ***
Enquiries : Ms. Winnie Wong or Prof. J. Wang, Department of Automation and Computer-Aided Engineering, CUHK at 2609 8337. *ACAE Series (2004-05) is contained in the World-Wide Web home page at http://www.acae.cuhk.edu.hk/en/seminars/seminars.html